File:EUV triple patterning vs DUV quadruple patterning.png
Size of this preview: 800 × 385 pixels. Other resolutions: 320 × 154 pixels | 640 × 308 pixels | 1,024 × 493 pixels | 1,787 × 860 pixels.
Original file (1,787 × 860 pixels, file size: 58 KB, MIME type: image/png)
 | This is a file from the Wikimedia Commons. Information from its description page there is shown below. Commons is a freely licensed media file repository. You can help. |
Summary
| Description |
English: Some bidirectional metal layouts will force more than double patterning for either EUV or DUV. This will happen if the minimum space between metal is too small. Source: https://www.youtube.com/watch?v=qiCOpeQJZPM |
| Date | |
| Source | Own work |
| Author | Guiding light |
Licensing
I, the copyright holder of this work, hereby publish it under the following license:
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 06:02, 1 June 2025 | | 1,787 × 860 (58 KB) | Guiding light | Label change |
| 05:57, 1 June 2025 |  | 1,787 × 851 (55 KB) | Guiding light | Uploaded own work with UploadWizard |
File usage
The following page uses this file:
